{"id":4547,"date":"2020-10-26T08:06:50","date_gmt":"2020-10-26T08:06:50","guid":{"rendered":"https:\/\/ouman.eu\/?p=4547"},"modified":"2020-10-26T08:06:50","modified_gmt":"2020-10-26T08:06:50","slug":"%e8%a7%a3%e5%af%86%e5%85%89%e5%88%bb%e6%9c%ba%e5%b7%a8%e5%a4%b4asml%e7%9a%84%e5%8f%91%e5%ae%b6%e5%8f%b240%e5%b9%b4%e5%89%8d%e8%bf%98%e6%98%af%e5%b0%8f%e5%85%ac%e5%8f%b8%e5%9b%be","status":"publish","type":"post","link":"https:\/\/ouman.eu\/?p=4547","title":{"rendered":"\u89e3\u5bc6\u5149\u523b\u673a\u5de8\u5934ASML\u7684\u53d1\u5bb6\u53f2:40\u5e74\u524d\u8fd8\u662f\u5c0f\u516c\u53f8(\u56fe)"},"content":{"rendered":"<div id=\"shownewsc\"><center><a href=\"https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/98b9c6f270.jpg\" rel=\"attachment wp-att-4548\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone  wp-image-4548\" src=\"https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/98b9c6f270-300x200.jpg\" alt=\"\" width=\"404\" height=\"269\" 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\/>\n\u5728\u9510\u5bf9\u8bdd\u8fde\u7ebf\u76f4\u64ad\u4e2d\uff0c\u96f7\u5409\u6885\u514b\u8868\u793a\uff0c\u5c3d\u7ba1\u5f53\u65f6\u6574\u4e2a\u5149\u523b\u673a\u5e02\u573a\u88ab\u7f8e\u56fdGCA\u548c\u5c3c\u5eb7\u5784\u65ad\uff0c\u4f46\u5728ASML\u6210\u7acb\u7684\u4e00\u5f00\u59cb\uff0c\u4ed6\u4eec\u5e76\u4e0d\u6ee1\u8db3\u6b64\u65f6\u7684\u6280\u672f\u7814\u53d1\u6210\u5c31\uff0c\u76ee\u6807\u5219\u662f\u8981\u201c\u5f81\u670d\u4e16\u754c\u201d\u3002<\/p>\n<p>\u201c\u4ece\u98de\u5229\u6d66\u5265\u79bb\u72ec\u7acb\u76841984\u5e74\uff0cASML\u5728\u5f53\u65f6\u5236\u9020\u5149\u523b\u673a\u516c\u53f8\u6392\u540d\u7684\u540d\u5355\u4e0a\u57ab\u5e95\uff0c\u4f4d\u4e8e\u5012\u6570\u7b2c\u4e00\uff0c\u5f53\u65f6\u7684\u9738\u4e3b\u662f\u7f8e\u56fdGCA\u548c\u65e5\u672c\u7684\u5c3c\u5eb7\u3002\u4f46ASML\u8ba4\u4e3a\uff0c\u5728\u5149\u523b\u673a\u9886\u57df\uff0c\u4e89\u53d6\u7b2c\u4e8c\u540d\u6216\u7b2c\u4e09\u540d\u662f\u6ca1\u6709\u7528\u7684\uff0c\u53ea\u6709\u6210\u4e3a\u7b2c\u4e00\u540d\uff0c\u8fd9\u6837\u624d\u80fd\u6210\u4e3a\u8d62\u5bb6\u3002\u201d 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\/>\n<b><br \/>\n1\u3001\u4e24\u4f4d\u201c\u8d35\u4eba\u201d<\/b><\/p>\n<p>2004\u5e74\uff0cASML\u548c\u53f0\u79ef\u7535\u5171\u540c\u7814\u53d1\u51fa\u7b2c\u4e00\u53f0\u6d78\u6da6\u5f0f\u5fae\u5f71\u5149\u523b\u673a\uff0c\u4f18\u79c0\u7684\u6027\u80fd\u548c\u7a33\u5b9a\u7684\u6280\u672f\uff0c\u6ce2\u957f\u8fbe132nm\uff0c\u5168\u9762\u78be\u538b\u5c3c\u5eb7\u7684157nm\uff0c\u83b7\u5f97\u884c\u4e1a\u5173\u6ce8\u3002<\/p>\n<p>\u96f7\u5409\u6885\u514b\u5728\u9510\u5bf9\u8bdd\u4e2d\u79f0\uff0c\u5176\u5b9eASML\u80fd\u591f\u9047\u5230\u8fd9\u4e2a\u201c\u8d35\u4eba\u201d\u7684\u4e3b\u8981\u539f\u56e0\uff0c\u662f\u7531\u4e8e\u53f0\u79ef\u7535\u3001\u98de\u5229\u6d66\u548cASML\u4e09\u5bb6\u4e4b\u95f4\u6709\u5bc6\u5207\u7684\u5f00\u53d1\u5173\u7cfb\u3002<\/p>\n<p>\u201c\u53f0\u79ef\u7535\u5b9e\u9645\u4e0a\u662f\u572880\u5e74\u4ee3\u672b\u5f00\u59cb\u8d77\u5bb6\u7684\uff0c\u548c\u98de\u5229\u6d66\u6709\u7740\u5f88\u4e45\u7684\u5386\u53f2\u6e0a\u6e90\u3002\u53f0\u79ef\u7535\u5229\u7528\u7684\u662f\u98de\u5229\u6d66\u516c\u53f8\u5f00\u53d1\u7684\u82af\u7247\u751f\u4ea7\u6280\u672f\uff0c\u53cc\u65b9\u6709\u4ea4\u53c9\u534f\u8bae\uff0c\u6240\u4ee5\u5728\u4e8c\u5341\u5e74\u524d\uff0c\u98de\u5229\u6d66\u5728\u53f0\u79ef\u7535\u6709\u80a1\u4efd\uff0c\u5927\u7ea610%\u5de6\u53f3\uff0c\u4f46\u73b0\u5728\u662f\u6ca1\u6709\u80a1\u4efd\u7684\u3002\u201d\u96f7\u5409\u6885\u514b\u8868\u793a\u3002 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src=\"https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/182c433a81-300x169.jpg\" alt=\"\" width=\"451\" height=\"254\" srcset=\"https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/182c433a81-300x169.jpg 300w, https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/182c433a81.jpg 650w\" sizes=\"auto, (max-width: 451px) 100vw, 451px\" \/><\/a><\/p>\n<p>ASML\u7684\u5149\u523b\u673a\u539f\u578b<\/center><br 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\/>\n\u5728\u9510\u5bf9\u8bdd\u8fde\u7ebf\u76f4\u64ad\u4e2d\uff0c\u96f7\u5409\u6885\u514b\u5f62\u5bb9\uff0c\u8fd9\u4e00\u7ec4\u7ec7\u50cf\u662f\u4e00\u4e2a\u6295\u8d44\u627f\u8bfa\uff0c\u786e\u5b9a\u82af\u7247\u751f\u4ea7\u5546\u9700\u8981EUV\u5149\u523b\u673a\uff0c\u8bf7\u66f4\u591a\u5382\u5546\u53c2\u4e0e\u3001\u5e2e\u52a9\u5f00\u53d1\u8fd9\u9879\u6280\u672f\u3002<\/p>\n<p>\u201c\u5bf9\u4e8eASML\u6765\u8bf4\uff0c\u8fd9\u662f\u4e00\u4e2a\u91cd\u8981\u7684\u4fe1\u606f\uff08\u6765\u6e90\uff09\u3002\u5b83\u5b9e\u9645\u4e0a\u662f\u63a8\u8fdbEUV\u5149\u523b\u673a\u5411\u524d\u53d1\u5c55\u7684\u7eff\u706f\uff0c\u5e76\u4e14\u8ba9\u5ba2\u6237\u5bf9\u8fd9\u9879\u6280\u672f\u6295\u5165\u80fd\u591f\u505a\u51fa\u5f88\u5927\u7684\u56de\u62a5\u627f\u8bfa\u3002\u201d<\/p>\n<p>2012\u5e7410\u6708\uff0c\u5728\u653f\u5e9c\u8bb8\u53ef\u4e0b\uff0cASML\u65a5\u8d4419.5\u4ebf\u6b27\u5143\uff0825\u4ebf\u7f8e\u5143\uff09\u6536\u8d2d\u7f8e\u56fd\u9876\u7ea7\u5149\u6e90\u4f01\u4e1aCymer\uff0c\u5176\u4e3b\u8981\u5236\u9020\u6fc0\u5149\u5668\uff0c\u8fd9\u52a0\u901f\u4e86ASML EUV\u5149\u523b\u673a\u7684\u7814\u53d1\u4e4b\u8def\u3002<\/p>\n<p>\u7531\u4e8e\u6709\u53f0\u79ef\u7535\u3001\u82f1\u7279\u5c14\u7684\u652f\u6301\uff0c\u7ecf\u8fc7\u5341\u5e74\u7684\u7814\u53d1\u8fc7\u7a0b\uff0c2015\u5e74\uff0cASML\u7ec8\u4e8e\u5c06EUV\u5149\u523b\u5de5\u827a\u5904\u4e8e\u53ef\u91cf\u4ea7\u7684\u72b6\u6001\u3002<\/p>\n<p>\u968f\u540e\u76845\u5e74\u65f6\u95f4\u91cc\uff0c\u5c3c\u5eb7\u5931\u53bb\u4e8650%\u4ee5\u4e0a\u7684\u5149\u523b\u673a\u5e02\u573a\u4efd\u989d\u3002<\/p>\n<p>\u96f7\u5409\u6885\u514b\u8868\u793a\uff0c\u5728EUV\u8fd9\u4e2a\u6280\u672f\u9886\u57df\u4e2d\uff0cASML\u62e5\u6709\u5927\u91cf\u53d7\u4fdd\u62a4\u7684\u4e13\u5229\u548c\u77e5\u8bc6\u4ea7\u6743\uff0c\u5e76\u4e14\u53ef\u4ee5\u53d1\u660e\u548c\u521b\u9020\u5149\u523b\u673a\u673a\u5668\uff0c\u8fd9\u8ba9ASML\u5c06\u5904\u4e8e\u957f\u671f\u6280\u672f\u5784\u65ad\u5730\u4f4d\u3002<\/p>\n<p><center><br \/>\n<a href=\"https:\/\/ouman.eu\/wp-content\/uploads\/2020\/10\/4650c33f4f.jpg\" rel=\"attachment 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